DPCDual-Zone Pressure ControllerDISCONTINUED
The Dual-Zone Pressure Controller (DPC) is a highlyintegrated closed-loop pressure control subsystem.It consists of an inlet pneumatic shut-off valve, twoindependent channels of pressure control with mass flowmetering, and a vacuum outlet. Each pressure controlchannel consists of a pressure sensor, a control valve,and a mass flow meter, similar to the 649 PressureController with Integral Mass Flow Meter.Product FeaturesThe DPC has been designed to reduce the overall cost ofownership of pressure control subsystems for backsidewafer cooling, specifically for the latest two-zoneelectrostatic chucks (Figure 1).
Provide accessories for GM and SV condensate pumps and cryopumps.
The following are some of the cold pumps and accessories for sale (there are still many accessories that have not been uploaded, please call for advice):
PerformanceAccuracy Pressure TransducerMass Flow Meter• ±0.5% Reading1• ±1.0% Full Scale2Leak Integrity Internal to ExternalThrough Closed Control Valve• <10-9 scc/sec He• <1% Full ScalePressure Control RangeStability at Set PointControl Time to Set Point• 10-100% Full Scale• <0.1% set point• <2.0 seconds, typicalTemperature CoefficientZeroSpanPressure<0.02% Full Scale/°C<0.04% Reading/°CFlow <0.05% Full Scale/°C <0.08% Reading/°CWarm Up Time 1 hourMechanicalMaximum Inlet Pressure 45 psia3Dimensions (L x W x H) 10.46 in (incl. fittings) x 3.36 in x 5.35 in 26.56 cm (incl. fittings) x 8.53 cm x 13.59 cmFittings Swagelok® 4 VCR® male compatibleOverpressure Limit 45 psia or 200% Full Scale, whichever is greaterFull Scale Ranges PressureFlow• 10, 20, 50, 100 Torr• 10, 20, 50, 100 sccmPressure Transducer Absolute pressure capacitance manometerSurface Finish Ra <10 µinches, electropolishedWeight 10.5 lbs. (4.8 Kg)Wetted Materials 316L Stainless Steel, Inconel®, Nickel, Elgiloy®, ®Electrical - Analog DPCInput Power ±15 VDC ±5%, 500 mA, maximum during first five seconds at start up, 400 mA at steady stateElectrical Connectors 15 pin D male (one per channel)Output Signals FlowPressure• 0 to 5 VDC• 0 to 10 VDCPressure Set Point Input 0 to 10 VDCControl Adjustments IntegralProportional• 10 positions (0 through 9)• 10 positions (0 through 9)Maximum Cable Length 100 ftElectrical - DeviceNet™ DPCInput Power 11-25 VDCElectrical Connector MAC ID's• 5-pin sealed microconnector with DeviceNet pin assignments• 2, one for each pressure control channel (4 MAC ID switches)Baud Rate (user selectable) • 125 Kbps (Network Length 500m)• 250 Kbps (Network Length 250m)• 500 Kbps (Network Length 100m)• PGM (Programmable over the network)Digital Functions • Read Pressure• Read Flow• Set Control Loop PID• Select Units• Set ZeroVisual Indicators • LED Network Status (green/red) • LED Module Status (green/red)EnvironmentalAmbient Operating Temperature 15° to 50°C (59° to 122°F)RangeStorage Temperature RangeStorage -20° to 80°C (-4° to 176°F)Humidity Range 0 to 95% Relative Humidity, non-condensing
ON BOARD 8F CRYOPUMP AMAT ENDURA 8116143G001
CTI-TOR8
Cryo-Torr Interface 8135903G001
Granville-Phillips Vacuum Guage Controller NR
15K High Capacity Array
CTI Maintenance Kits
Helium Line AMAT 3400-01109 CTI 8043086G240
TC Gauge 8112105
Cryo-Torr Interface 8135903G001
| Product Name |
HORIBA LF-410A-EVD |
| Power Consumption Working Current |
12v |
| Power Consumption |
2w |
| Medium |
nitrogen |
Mks TYPE670 vacuum gauge calibrator 690 sensor
722C01TCD2FJ electronic vacuum gauge MKS vacuum gauge 1TORR 4VCR
Maintenance and sales of brooksinstrument VDM300 lam796-055344R007
MKS MFVC-29886 MKS MFVC-34785 MKS MFVC-32497 MKS VODMB-26565 LAM 797-004456R005 MKS390100-YG 275071 392100-YE MKS-226A-29571 AMAT0190-50856 019 0-51152 MKS649A12T51CAMR 1179A01922CR1AV-K MKS GE50A-30351
Maintenance of BROOKS AUTOMATION Controller 978-262-2900(165463)
MKS SENTRY 1510 flowmeter AERA EPV100-AW
TEL equipment flowmeter maintenance ckdtrp4-35-a100t-x0002
cooling
temperature under 25° C and a backing pump of 10,000 l/min size or larger used.
The value is changed if operated under different conditions
Technical Data
STP-iXA4506 Series/Pumping Speed Against Inlet Pressure
EDwardsSTP-H1303C molecular pump plus SCU-800 controller in stock.
FIL-TECH Convection Gauges CVG 101ga/101gb/1 in USA.
01GG
VAT APC Controller(PM7)796-098290-002
Mks Vacuum Gauge 356004-YG-THORIBA VALVE New Original 0190-36237 Flowmeter
MKS 390521-3-YH-T-0018 Granville-Phillips vacuum gauge AMAT gas flowmeter 0190-51152
Granville-Phillips diaphragm gauge 390628-0-YE-T 390B6636
MKS 390628-0-YE MKS GRANVILLE-PHILLIPS gauge P/N:390628-0-YE-T 390628-0-YE-T 390B6636
LAM796-055344-005
characteristic
Flow range: 3 slpm (deionized water vapor)
Direct water vapor measurement with ultra-high flow accuracy
Can be directly connected to the deionized water supply system of the factory building.
Operatable at low temperature (non-overheated state)
Optimal design of scouring and drainage
EtherCAT digital communication
Brooks Expert Support Tool (BEST) graphical user interface
Audited Supplier 
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