The On-Board® IS 320FX Cryopump, developed specifically to address the challenges of today's ion implant processes, provides enhanced hydrogen pumping speed and capacity while maintaining all the quality, performance and reliability benefits you've come to expect from the On-Board® IS 320FE cryopump.
The On-Board® IS 320FX cryopump is designed to deliver the highest hydrogen vacuum pumping speed and capacity possible for improved product yield and tool throughput. Building upon Edwards' extensive cryogenic pump design expertise, this cryopump outperforms all other comparably sized pumps while meeting rigorous safety guidelines.
Intelligent system controls deliver better process quality, vacuum consistency and uptime, while providing real-time system knowledge for optimised motor speed and cryogenic temperature. Automatic adjustment for changing heat/gas loading conditions enhances vacuum consistency and improves inter-wafer recovery time. The On-Board® IS 320FX also adjusts for accumulation of process-related coatings without compromising reliability or productivity.
The On-Board® IS system ensures full use of system-level helium resources for any operational condition. A patented control system continuously regulates the helium allocation per pump thereby, increasing the pump-to-compressor ratio for reduced cost of ownership. In addition, On-Board IS cryopump systems reduce power and cooling water consumption.
Our state-of-the-art cryogenic array design with higher capacity brings about longer run times between regenerations, and reduces the impact of ion implant residuals for longer pump life. The IntelliPurge power management reduces unexpected pump regeneration due to short-term power failure, and ensures safety during an extended power outage. Proprietary regeneration sequences shorten regeneration time and ensure consistency in the performance of the pump after regenerations.
An integrated TC gauge and gate valve interlock eliminates the need for additional controllers, while integrated rough, purge, vent valves and controls simplify installation and improve system reliability
| On-Board Cryopump Model |
250F |
400 |
| Water Vapour |
6500 |
17500 |
| Hydrogen (5x10-6torr) |
16 |
42 |
| First and Second Stage |
<3.3 hrs |
3 hrs |
| Second Stage |
<1.5 hrs |
<1.5 hrs |
| Power |
200/230 VAC 50/60 Hz 1Ø, (5A) |
200/230 VAC 50/60 Hz 1Ø, (5A) |
Product Description
Integrated Controls Pump-mounted, Field-replaceable Module Motor Drive Electronics Host Communication Interface (RS-232C, DB-9 Connector) First Stage Temperature Control Helium Management Service Communications Port Remote Display Option Gate Valve Control
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