Product Description
High Accuracy In-Situ Mass Flow Verifier
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Enables "Wafer-to-Wafer" "Chamber-to-Chamber" & "Tool-to-Tool" Matching
The HA-MFV, High Accuracy Mass Flow Verifier is designed for use on process tools to verify mass flow control flow rates in-situ. Available with EtherCAT® or DeviceNet™ communications and measurement accuracy of 1.0% of reading, the HA-MFV can verify MFC flow with the actual process gas significantly better than older rate-of-rise devices or process chamber rate-of rise methods.
- 1.0% accuracy for wafer-to-wafer, chamber-to-chamber, & tool-to-tool process matching
- Supports multiple gas panels to reduce implementation costs
- 5 to 3000 sccm measurement range for a wide variety of processes
- In-situ assessment of MFC flow rate improves process control and avoids unneeded down-time
- See All Features
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HA-MFVMass Flow Verifier, 1% of Reading Accuracy, 5 - 3000 sccm |
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Specifications
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Mass Flow Verification Accuracy
±1.0% of Reading
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Mass Flow Verification Range
5 - 3000 sccm (N2 equivalent)
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Repeatability
±0.5% of Reading
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Reproducibility
±0.3% of Reading
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Pressure Range
100 Torr
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Pressure Accuracy
0.25% of Reading
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Proof Pressure
45 psia
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Burst Pressure
150 psig
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Minimum Penumatic Air Supply Pressure
80 psig
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Maximum Penumatic Air Supply Pressure
100 psig
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Span Temperature Coefficient
<0.002% Reading/°C
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Warm-up Time
60 minutes
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Operating Temperature
10° to 40°C
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Temperature Display
0 - 100°C
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Temperature Accuracy
± 2°C
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Temperature Resolution
0.1°C
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Storage Humidity
0 to 95% RH non-condensing
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Storage Temperature
-20° to 60°C
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Control Interface
DeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
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Diagnostic Interface
Ethernet RJ-45 female
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Input Voltage
11 to 25 VDC
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Gas Supply Fitting
Swagelok® compatible 8-VCR® female, rotatable
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Vacuum Supply Fitting
Swagelok® compatible 8-VCR® male type, rotatable
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Pneumatic Air Supply Fitting
1/8 inch one-touch quick connect tube
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External Leak Integrity
<1 x 10-9 scc/sec He
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Wetted Materials
316L SST passivated, Inconel, Incoloy
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Seal Material
316 SST nickel plated
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Valve Seat Material
PCTFE with Elgiloy® Diaphragm
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Surface Finish
<32 µ inches Ra
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Dimensions
6.98 x 10.0 x 10.0 in.
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Weight
23.9 lbs
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Compliance
CE
brooksinstrument VDM300 repair and sale lam796-055344R007
MKS MFVC-29886 MKS MFVC-34785 MKS MFVC-32497 MKS VODMB-26565 LAM 797-004456R005 MKS390100-YG 275071 392100-YE MKS-226A-29571 AMAT0190-50856 0190-51152 MKS649A12T51CAMR 1179A01922CR1AV-K MKS GE50A-30351
BROOKS AUTOMATION Controller Maintenance 978-262-2900 (165463)
MKS SENTRY 1510 Flow meter AERA EPV100-AW
TEL equipment Flow meter maintenance ckd tpr4-35-A100T-X0002
cooling
t
Provide accessories for GM and SV condensate pumps and cryopumps.
The following are some of the cold pumps and accessories for sale (there are still many accessories that have not been uploaded, please call for advice):
ON BOARD 8F CRYOPUMP AMAT ENDURA 8116143G001
CTI-TOR8
Cryo-Torr Interface 8135903G001
Granville-Phillips Vacuum Guage Controller NR
15K High Capacity Array
CTI Maintenance Kits
Helium Line AMAT 3400-01109 CTI 8043086G240
TC Gauge 8112105
Cryo-Torr Interface 8135903G001
| Product Name |
HORIBA LF-410A-EVD |
| Power Consumption Working Current |
12v |
| Power Consumption |
2w |
| Medium |
nitrogen |
Mks TYPE670 vacuum gauge calibrator 690 sensor
722C01TCD2FJ electronic vacuum gauge MKS vacuum gauge 1TORR 4VCR
Maintenance and sales of brooksinstrument VDM300 lam796-055344R007
MKS MFVC-29886 MKS MFVC-34785 MKS MFVC-32497 MKS VODMB-26565 LAM 797-004456R005 MKS390100-YG 275071 392100-YE MKS-226A-29571 AMAT0190-50856 019 0-51152 MKS649A12T51CAMR 1179A01922CR1AV-K MKS GE50A-30351
Maintenance of BROOKS AUTOMATION Controller 978-262-2900(165463)
MKS SENTRY 1510 flowmeter AERA EPV100-AW
TEL equipment flowmeter maintenance ckdtrp4-35-a100t-x0002
cooling
temperature under 25° C and a backing pump of 10,000 l/min size or larger used.
The value is changed if operated under different conditions
Technical Data
STP-iXA4506 Series/Pumping Speed Against Inlet Pressure
EDwardsSTP-H1303C molecular pump plus SCU-800 controller in stock.
FIL-TECH Convection Gauges CVG 101ga/101gb/1 in USA.
01GG
VAT APC Controller(PM7)796-098290-002
Mks Vacuum Gauge 356004-YG-THORIBA VALVE New Original 0190-36237 Flowmeter
MKS 390521-3-YH-T-0018 Granville-Phillips vacuum gauge AMAT gas flowmeter 0190-51152
Granville-Phillips diaphragm gauge 390628-0-YE-T 390B6636
MKS 390628-0-YE MKS GRANVILLE-PHILLIPS gauge P/N:390628-0-YE-T 390628-0-YE-T 390B6636
LAM796-055344-005
characteristic
Flow range: 3 slpm (deionized water vapor)
Direct water vapor measurement with ultra-high flow accuracy
Can be directly connected to the deionized water supply system of the factory building.
Operatable at low temperature (non-overheated state)
Optimal design of scouring and drainage
EtherCAT digital communication
Brooks Expert Support Tool (BEST) graphical user interface
Audited Supplier 
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